• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    There is provided a terminal block for a magnetron system with a rotating target which comprises a terminal block body with a rotating bearing, the terminal block body being configured on its outer side to be applied to a support device and the rotating bearing being. configured on its end accessible from the outside of the terminal block body to be connected to the rotating target, the mounting of the terminal block body on the support device being carried out in a movable manner. It is further proposed in the case of a vacuum coating plant with a vacuum chamber and a magnetron system arranged in the vacuum chamber with a rotating target which is rotatably mounted on at least one terminal block that least one terminal block is designed as described above.
    公开号:BE1019023A5
    申请号:E2009/0431
    申请日:2009-07-15
    公开日:2012-01-10
    发明作者:Hans-Juergen Heinrich；Goetz Grosser；Sven Haehne；Ulf Seyfert
    申请人:Ardenne Anlagentech Gmbh；
    IPC主号:
    专利说明:

    "Terminal block for a maqnetron system with rotating target and vacuum coating plant"
    A terminal block for a magnetron system with a rotating target and a vacuum coating plant with such a magnetron system, which are of simple construction and easy maintenance, will be described hereinafter.
    In vacuum coating technology, so-called rotary magnetrons are known in which a most often tubular target surrounds a magnet structure, the tubular target being rotatably mounted and drivable such that the target material is removed from the body. uniform way. The tubular target is generally fixed in the vacuum chamber of a vacuum coating installation between two end blocks which are constructed in such a way that they respectively allow the rotational mounting of the tubular target. Most often, different functions are, in this case, assigned to the two terminal blocks. One of the terminal blocks is, in general, embodied as a terminal power supply unit for supplying the magnetron with cooling water and electrical energy and the other terminal block is designed as a drive terminal block for inducing a torque for to generate the rotation of the tubular target.
    The known terminal blocks, both the feed terminal blocks and the drive terminal blocks, are usually rigidly connected to a support device, for example to a chamber wall or a chamber cover, and in fact either directly either via a spacer which serves to influence the distance between the magnetron and the substrate. Such terminal blocks are known for example from the documents DE 10 2007 049735 A1 and WO 2007/147757 A1. This is why the distance between the two terminal blocks is predefined because of the target length predefined by the application. Due to this fixed distance of the terminal blocks, however, the free space that is available for mounting the target between the terminal blocks is very limited. At the ends of the target, there may be unequal distances from the dark-ground shields usually provided on the terminal blocks. During a process-induced warming of the target tube and consequent linear thermal expansion, the distance from the dark background changes on one side and the point of application of the coupling element which is usually attached to the end of the target to pick up the rotational torque of a drive shaft moves. In addition, the length of the target tubes must be within very narrow tolerances.
    It is therefore necessary to provide an improved terminal block for which the production tolerance requirements of the components are lower than for the known drive terminal blocks, the mounting and dismounting of the target being simplified and the linear expansions of the target tube due to heat being compensated.
    To this end, there is provided a terminal block for a magnetron system with a rotating target, which comprises a terminal block body with a rotational bearing, the end block body being configured on its outer side to be applied to a device support and the rotatable bearing being configured at its end accessible from the outside of the terminal block body to be connected to the rotating target, the application of the terminal block body on the support device being made movably.
    Rotary bearing in the context of the proposed terminal block is understood to mean support devices which allow rotational mounting for the target. They may be, for example, shafts which are rotatably mounted in the terminal block body and allow a fixed solidarity connection with the target but also shafts or shaft ends, that is, said journals which are integral in rotation of the terminal block body and allow a rotational mounting of the target at its end accessible from the outside of the terminal block body. To drive the target, the configuration of the rotary bearing as a shaft is advantageous, but drive terminal blocks, in which the target is rotatably mounted on an axis locked in rotation, can however also be realized. In the same way, terminal supply units may also have a rotational bearing which is embodied as an axis or a shaft.
    A support device to which the terminal block is movably applied may be, for example, a chamber wall or a chamber cover of a vacuum coating plant or other support structure arranged for this purpose at the inside the vacuum coating installation.
    For mobile mounting on a support structure, the terminal block can be configured for example in such a way that the terminal block body has on its outer side a free bearing.
    A free bearing is a bearing which prevents movement of the terminal block at least in a spatial direction (for example the z direction of a Cartesian coordinate system). In other words, a free bearing can be any type of bearing that allows movement of the terminal block in a spatial direction (for example, the x or y direction of a Cartesian coordinate system) or in a plane. (Two spatial directions, for example the x and y directions of a Cartesian coordinate system) but at the same time ensures that the terminal block remains linked to the support device in each situation. Also included are bearings that prevent movement in a spatial direction but at the same time allow rotation around this direction.
    In one configuration, there may be provided on the terminal block body a pendular retainer which is connected at one end to the terminal block body and which can be connected on the other side to a support device and which is designed to such that it allows a movement of the terminal block body at least parallel to the axis of rotation of the rotational bearing, for example the drive shaft of a terminal block power supply. In a simple configuration of such a pendular retaining device, a rotation of the terminal block body about the spatial axis (y axis) located transversely to the axis of rotation of the rotary bearing (x axis) such as it occurs for example when the target bends because of its own weight in the direction of the z axis, that is to say around the y axis, is in this case possible. If one wishes to prevent this, the pendulum retaining device can be made, for example, as a parallelogram so that a displacement in the x direction is guaranteed and a rotation around the y axis is prevented. .
    In another configuration, there can be provided on the terminal block body a linear guide which is connected at one end to the terminal block body and on the other side to a support device and which is designed in such a way that allows a movement of the terminal block body at least parallel to the axis of rotation of the rotary bearing (x-axis). In this case, it may further be provided that a displacement of the terminal block body is possible in the y direction.
    It may further be provided on the terminal block that a flexible pipe is provided for the power supply of the target and / or for supplying the target with a coolant. In this case, it is one of the terminal power supply units described above.
    It can be provided as a replacement or in addition that an electric motor for transmitting a torque to the shaft and a flexible pipe for the electrical power of the electric motor are further provided in the block body terminal. When this feature is provided in addition to the power supply of the target and the supply of the target with a coolant, it is a combined terminal block drive and power supply, in the case opposite of a pure terminal drive block.
    It is furthermore proposed in the case of a vacuum coating plant with a vacuum chamber and a magnetron system arranged in the vacuum chamber with a rotating target which is rotatably mounted on at least one terminal block which minus a terminal block is configured as described above. It is therefore possible to avoid the disadvantages described above known terminal blocks so that, for example, linear thermal expansion of the target is compensated by a spacing movement of at least one terminal block and that disassembly of used targets and assembly of new targets is facilitated.
    That is why it is provided in a configuration that the rotating target is mounted on one side on a terminal block supply to supply the magnetron system cooling agent and electrical energy and the other side on a block driving terminal for inducing a torque and that the power supply terminal block is stationarily mounted and that the drive terminal block is movably mounted.
    The invention will be explained in more detail below on the basis of an exemplary embodiment and a drawing relating thereto. The special one
    Fig. 1 shows a section through the vacuum chamber of a vacuum coating plant with a side view of a magnetron system.
    A magnetron system in which a rotating target 3 is disposed between a supply terminal block 2 and a drive terminal block 4 is shown in a vacuum chamber 1. The target 3 is rotatably mounted with each end on one of the two terminal blocks 2, 4. The chamber wall, in the embodiment of the chamber ceiling, forms the support device 11 for the terminal blocks 2, 4.
    The terminal power supply unit 2 comprises a terminal block body 21 rigidly connected to the support device 11 by an insulating element 23 and comprising a rotary bearing 22 for the rotational mounting of the target 3, which is accessible to the user. the interior of the vacuum chamber 1 from the outer side of the terminal block body 21 and which is adapted to receive the target 3. For supplying the target with electrical energy and with a coolant, provision is made in the chamber wall an opening 12 through which is guided a pipe 24 for electrical energy and a coolant. Due to the rigid connection between the power supply terminal block 2 and the support device 11, this pipe 24 must not be flexible.
    Faced with the terminal supply block 2 is a terminal drive unit 4 which comprises a terminal block body 41 rigidly connected to a pendular retaining device 6 by an insulating element 43 and comprising a rotary bearing 42 for the rotational mounting of the target 3. The rotational bearing 42 is accessible inside the vacuum chamber 1 by the outer side of the terminal block body 41 and is designed to receive the target 3. The rotational bearing 42 is realized here as a rotatably mounted shaft in the terminal block body 41 which has an end located inside the terminal block body 41 to which is connected an electric motor 5 which is disposed therein and is intended to transmit a rotational torque to train the target 3.
    The pendular retaining device 6 comprises a connection plate 61 for connection with an insulating member 43 and the terminal block body 41, a pendulum arm 62 hingedly connected to the connecting plate 61 and a bell 63 connected to the support device 11, that is to say to the outer side of the chamber wall, on which the swing arm 62 is hingedly applied so that the pendulum arm 62 projects into the chamber vacuum 1 through an opening 12 provided in the chamber wall.
    The pendulum retaining device 6 allows movement of the end block body 41 in the x direction so that the linear expansions of the target 3 are compensated and the maintenance work is facilitated. At the same time as a displacement of the end block body 41 in the x direction, a displacement also always occurs in the z direction, which is shorter as the pendulum bottom 62 is longer. This can be influenced by a corresponding choice of the height of the bell 63.
    To supply electric motor 5 with electrical energy, there is provided a pipe 44 extending from the upper side of the bell 63 to the connecting plate 61 of the pendular retaining device 6, which is flexibly formed in the exemplary embodiment for compensating movements of the body 41 of the terminal block. For this purpose, it is possible to use, for example, a flexible metal corrugated pipe.
    The two terminal blocks 2, 4 are each shielded 25, 45 which serves to prevent unwanted discharges and sprays as well as coatings on the terminal block bodies 21, 41 and the rotary bearings 22, 42.
    List of part numbers 1 Vacuum chamber 11 Support device 12 Opening 2 Terminal block 4 Terminal block 21, 41 Terminal block 22, 42 Rotary bearing 23, 43 Insulation element 24.44 Conduct 25.45 Shield 3 Target 5 Electric motor 6 Pendular retainer 61 Connection plate 62 Pendulum arm 63 Bell
    权利要求:
    Claims (8)
    [1]
    Terminal block for a magnetron system with a rotating target (3), comprising a terminal block body (21, 41) with a rotary bearing (22, 42), the terminal block body (21, 41) being configured on its outer side to be applied on a support device (11), and the rotary bearing (22, 42) being configured at its end accessible from the outside of the terminal block body (21, 41) to be connected to a rotary target (3), characterized in that the mounting of the terminal block body (21, 41) on the support device (11) is movably arranged so as to allow movement of the body (21, 41). ) of terminal block at least parallel to the axis of rotation of the rotary bearing (22, 42).
    [2]
    2. Terminal block according to claim 1, characterized in that the body (21, 41) terminal block has on its outer side a free bearing.
    [3]
    Terminal block according to Claim 1, characterized in that a pendular retaining device (6) is provided on the end block body (21, 41) and is connected at one end to the body (21, 41) of terminal block and may be connected on the other side to a support device (11) and which is designed in such a way as to allow movement of the terminal block body (21, 41) at least parallel to the axis of rotation of the rotating bearing (22, 42).
    [4]
    Terminal block according to Claim 1, characterized in that a linear guide is provided on the terminal block body (21, 41) which is connected at one end to the terminal block body (21, 41) and can be connected on the other side to a support device (11) and which is designed in such a way as to allow movement of the terminal block body (21,41) at least parallel to the axis of rotation of the rotary bearing ( 22, 42).
    [5]
    5. Terminal block according to any one of claims 1 to 4, characterized in that there is further provided a flexible pipe (24, 44) for the power supply of the target (3) and / or for the supplying the target (3) with a coolant.
    [6]
    6. Terminal block according to any one of claims 1 to 5, characterized in that it is further provided in the body (21, 41) of the terminal block an electric motor (5) for the transmission of a torque of rotary bearing rotation (22, 42) and a flexible pipe (24, 44) for the electrical supply of the electric motor (5).
    [7]
    7. Vacuum coating plant with a vacuum chamber (1) and a magnetron system arranged in the vacuum chamber and comprising a rotary target (3) which is rotatably mounted on at least one terminal block (2, 4) , characterized in that at least one terminal block (2, 4) is designed according to one of claims 1 to 6.
    [8]
    Vacuum coating plant according to claim 7, characterized in that the rotary target (3) is mounted at one end on a supply terminal block (2) for supplying the magnetron system with cooling medium and electrical energy and on the other side on a drive terminal block (4) to induce a rotational torque and in that the power supply terminal block (2) is mounted stationary and the drive terminal block ( 4) is movably mounted.
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    同族专利:
    公开号 | 公开日
    US8192598B2|2012-06-05|
    US20100012489A1|2010-01-21|
    DE102008033902A1|2010-01-21|
    DE102008033902B4|2012-01-19|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US5620577A|1993-12-30|1997-04-15|Viratec Thin Films, Inc.|Spring-loaded mount for a rotatable sputtering cathode|
    EP0698909A2|1994-08-25|1996-02-28|The Boc Group, Inc.|Magnetron apparatus|
    WO2007147757A1|2006-06-19|2007-12-27|Bekaert Advanced Coatings|Insert piece for an end-block of a sputtering installation|
    US6736948B2|2002-01-18|2004-05-18|Von Ardenne Anlagentechnik Gmbh|Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation|
    US7993496B2|2004-07-01|2011-08-09|Cardinal Cg Company|Cylindrical target with oscillating magnet for magnetron sputtering|
    DE502005006069D1|2005-08-10|2009-01-08|Applied Materials Gmbh & Co Kg|Vacuum coating system with motorized rotary cathode|
    DE102007049735B4|2006-10-17|2012-03-29|Von Ardenne Anlagentechnik Gmbh|Supply end block for a tubular magnetron|DE102010028421B4|2010-04-30|2012-02-23|Von Ardenne Anlagentechnik Gmbh|Ceramic rolling bearing and end block for a rotating magnetron|
    US9809876B2|2014-01-13|2017-11-07|Centre Luxembourgeois De Recherches Pour Le Verre Et La CeramiqueSarl|Endblock for rotatable target with electrical connection between collector and rotor at pressure less than atmospheric pressure|
    DE102014115280A1|2014-10-20|2016-04-21|Von Ardenne Gmbh|magnetron|
    DE102014115282B4|2014-10-20|2019-10-02|VON ARDENNE Asset GmbH & Co. KG|socket assembly|
    法律状态:
    2018-06-04| MM| Lapsed because of non-payment of the annual fee|Effective date: 20170731 |
    优先权:
    申请号 | 申请日 | 专利标题
    DE102008033902|2008-07-18|
    DE200810033902|DE102008033902B4|2008-07-18|2008-07-18|End block for a magnetron assembly with a rotating target and vacuum coating equipment|
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